| 摘要 |
PROBLEM TO BE SOLVED: To store and carry substrates on the way of being processed or already processed without changing their quality. SOLUTION: In a method of storing a plurality of substrates G of rectangular shape in the standing state through cushioning materials 32, 34 and 42 disposed respectively on a bottom section, an upper section and both side sections in a box and carrying them, the substrates are carried in the state of the interior of the box 20 being replaced with nitrogen gas. Also the substrates are carried in the state of introducing a drying agent into the box 20. As the substrates G are stored or carried in the state of being kept in the atmosphere not exposed to an oxygen or a water content, the substrates on the way of being processed or already processed substrates can be stored or carried without changing their quality.
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