| 摘要 |
A composite type thin film magnetic head, in which saturation and leakage of a magnetic flux can be suppressed although a pole portion is miniaturized and throat height, apex angle and MR height can be precisely formed to have desired values, and a method of manufacturing the same are proposed. A recessed portion 25 is formed in a substrate 23 by using, as a mask, a first magnetic layer 24 constituting a bottom shield for a MR layer 32, a second magnetic layer 27 and a thin film coil 30 are formed within the recessed portion such that the thin film coil is supported by an insulating layer 29 in an isolated manner, surfaces of these first and second magnetic layers and insulating layer are flattened to form a common unit for manufacturing a composite type thin film magnetic head. Then, a third magnetic layer 34 is formed such that the third magnetic layer is coupled with the second magnetic layer 27 to constitute a bottom pole and its surface is flattened. Then a flat write gap layer and a flat fourth magnetic layer 37 constituting a top pole, and the write gap layer and third magnetic layer are dry-etched to form a pole portion while pole portions of the write gap layer and fourth magnetic layer as a mask. On the thin film coil 30 of the common unit, insulating layer or additional thin film coil may be deposited to project upwardly.
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