发明名称 Conveying device for thin disk-like articles
摘要 A conveying device for thin disk-like articles (60), characterized by the following features: a support (10) having a plain surface (12), in the support (10) there is formed at least one gas channel (20) which channel, in running towards the plain surface in outwardly slanting manner, terminates at one of its ends in at least one gas outlet opening in the plain surface (12), the at least one gas channel being connectable to a gas supply pipe (28) at its other end, wherein at least three guiding arms (30) are disposed adjacent the at least one gas outlet opening(s) outside the at least one gas outlet opening and wherein the at least three guiding arms project beyond the plain surface (12) of the support (10) and are adjustable radially with respect to the plain surface (12).
申请公布号 US6152507(A) 申请公布日期 2000.11.28
申请号 US19980211414 申请日期 1998.12.15
申请人 SEZ SEMICONDCUTOR EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG 发明人 PIRKER, WILLIBALD
分类号 B65G47/91;B65G49/07;H01L21/673;H01L21/677;H01L21/68;H01L21/683;(IPC1-7):B25J15/06;B25J15/10 主分类号 B65G47/91
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