| 摘要 |
PROBLEM TO BE SOLVED: To obtain a uniform metal oxide having a high refractive index or low refractive index at a relatively low temperature simply, surely and inexpensively by forming a metal oxide gel from a metal oxide sol obtained from a metal alkoxide or a metal salt as a main raw material and subjecting the metal oxide gel to plasma treatment. SOLUTION: A metal alkoxide (preferably a metal selected from In, Sn, Zn, Al, Ti and Sb is preferably as the metal) or a metal salt (a halide compound, nitrate, sulfate, phosphate, carboxylate, etc.), is formulated with an organic compound having >=200 deg.C boiling point under atmosphere to give a metal oxide sol, which is formed into a metal oxide gel. Then the metal oxide gel is subjected to a plasma treatment by using hydrogen, oxygen, nitrogen, carbon dioxide or a fluorine-containing compound gas as a treating gas and properly controlling a gas species, a gas concentration, a gas sealing condition, pressure, etc., electric field intensity, discharge condition, etc., to produce a metal oxide. |
