发明名称 |
Wafer cassette rotation mechanism |
摘要 |
The present invention concerns a device for the rotation of a wafer cassette such as between a horizontal orientation and a vertical orientation. The wafer cassette rotation device includes a carriage for receiving and supporting a wafer cassette, a receptacle in which the carriage is supported and rotates, and a drive mechanism for rotating the carriage together with any wafer cassette that has been inserted into the carriage, between horizontal and vertical orientations. The carriage is shaped to receive a standard wafer cassette, the carriage open at both front and top portions, includes wafer cassette supports. Wheels may be attached to opposing side edges of the bottom of the carriage. A cam drive mechanism is used to move the carriage within the receptacle.
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申请公布号 |
US6152680(A) |
申请公布日期 |
2000.11.28 |
申请号 |
US19970918332 |
申请日期 |
1997.08.26 |
申请人 |
DAITRON, INC. |
发明人 |
HOWELLS, JOHN;NIEMEYER, III, ROBERT H. |
分类号 |
B65G49/07;H01L21/673;H01L21/677;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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