FERROELECTRIC THIN FILM FORMING COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a composition for forming a titanium-containing multiple metal oxide thin film useful as a ferroelectric. SOLUTION: The titanium-containing multiple metal oxide thin film forming composition is obtained by mixing the salt of a titanium complex and an amine and the salt of a metallic salt or a metallic complex of a metal other than titanium and an amine so as to contain the titanium and the metal other than titanium in a proper ratio. The stable composition containing the metals in a high concentration is obtained by preparing the titanium complex and the metallic complex with a ligand having a coordination number of <=5.