| 摘要 |
PROBLEM TO BE SOLVED: To provide an aqueous grinding liquid highly stable in the properties such as abrasive grain dispersibility, resistance to abrasive grain settling and viscosity for a long period of time, free from flammability and a characteristic odor which are found with an oily slurry, and easy to wash and clean cut wafers and equipment. SOLUTION: An aqueous grinding liquid has a composition comprising 40.0-95.0 wt.% polyhydric alcohol and/or its derivative, 5.0-50.0 wt.% water, 0.1-3.5 wt.% bentonite swollen particles, 0.1-5.0 wt.% cellulose and 0.5-10.0 wt.% mica. The bentonite swollen particles, the cellulose and the mica are compositely added so as to obtain a slurry viscosity, measured by a rotational cylindrical viscometer, in the range of 150-300 mPa.s. |
