发明名称 PRODUCTION OF SILICON SUBSTRATE FOR SOLAR BATTERY
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for producing a silicon substrate for a solar battery of high quality, high cell efficiency and a low cost by efficiently removing impurities contained in the metallic silicon starting raw material to the desired concentration level. SOLUTION: The high quality silicon substrate for a solar battery is obtained by melting high purity metallic silicon by an electron beam in vacuum in order to vaporize and remove volatile impurities such as P, Al, Ca or the like, then cutting and removing the condensed part of the heavy metal impurities such as Fe, Ti or the like in a purification process in a solidified phase, further crushing and washing the obtained ingot to obtain a coarsely purified raw material, subsequently plasma-melting the coarsely purified raw material under an oxidizing atmosphere to vaporize and remove non-volatile impurities such as B, C or the like as the oxides, furthermore cutting and removing the condensed part of heavy metal impurities such as Fe, Ti or the like in the solid phase finish purification process and finally slicing the purified ingot.</p>
申请公布号 JP2000327488(A) 申请公布日期 2000.11.28
申请号 JP19990144616 申请日期 1999.05.25
申请人 SHIN ETSU CHEM CO LTD 发明人 HIRASAWA TERUHIKO;TOKUNAGA KATSUSHI
分类号 H01L31/04;C30B29/06;(IPC1-7):C30B29/06 主分类号 H01L31/04
代理机构 代理人
主权项
地址