| 摘要 |
Disclosed is a failure analysis tool including a production tester electrically coupled to a test IC in such a manner that it can test the IC in a conventional manner (e.g. by providing a series of dynamic vectors), and also provide an OBIC signal to an OBIC detection system. This is accomplished by providing power to the IC through a voltage source having a non-zero internal resistance while the OBIC signal is generated, thus preventing the OBIC signal from shorting to ground when it is received at the power supply. Failure analysis is conducted by first performing functional testing with a production tester until a failing state is identified. While this functional testing is being performed, the internal resistance of the voltage source is set to zero. Then, when the failing state is identified, the internal resistance of the voltage source is set to a non-zero value and the IC is scanned by an optical beam to generate OBIC signals indicating the locus of the failure.
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