ETCHING EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An etching equipment for manufacturing a semiconductor device is provided to eliminate a partial stack of polymer and to prevent a particle from being generated from a shortage of thermal conduction of quartz parts. CONSTITUTION: An etching equipment for manufacturing a semiconductor device comprises an additional heat transfer material for heating parts of a quartz material facing an inner side of a process chamber(1). The additional heat transfer material is heated to heat the parts of a quartz material. And, the heat transfer material is a liquid material of which specific heat is higher than one, and is disposed in the manner that the material fills up a space formed inside the part of the quartz material.