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申请公布号
JP3111985(B2)
申请公布日期
2000.11.27
申请号
JP19980168602
申请日期
1998.06.16
申请人
发明人
分类号
H01L21/314;H01L21/338;H01L27/095;H01L29/06;H01L29/40;H01L29/78;H01L29/80;H01L29/812;(IPC1-7):H01L29/80
主分类号
H01L21/314
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