METHOD AND DEVICE FOR ACTIVATING SEMICONDUCTOR IMPURITIES,申请号KR1019997006520-传众专利搜索

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发明名称	METHOD AND DEVICE FOR ACTIVATING SEMICONDUCTOR IMPURITIES
摘要
申请公布号	KR20000070291(A)	申请公布日期	2000.11.25
申请号	KR1019997006520	申请日期	1999.07.19
申请人		发明人
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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