| 摘要 |
PROBLEM TO BE SOLVED: To reduce a leaving time of a substrate for impurity analysis at analyzing of impurities in the air inside a clean room. SOLUTION: In a substrate 1 for impurity analysis, on which impurities of an inorganic or organic type in the air of a clean room are adsorbed, a main surface 2 to be used as an impurity adsorbing surface is formed by etching or the like into a rough surface 3. Thereby an effective adsorption area of the major surface 2 is increased, and impurity sampling efficiency is improved. As a result, the time during which the substrate 1 is left standing in the clean room air can be reduced, and an impurity analysis efficiency can be improved.
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