发明名称 MANUFACTURE OF OSCILLATOR
摘要 <p>PROBLEM TO BE SOLVED: To improve the resonance phenomenon of an oscillator and the manufacture efficiency of the oscillator. SOLUTION: In a quartz substrate 11 worked by a chemical etching method, a resist for sand blast 12 is installed in a part where sand blast work is not executed. Fine particles 13 are used by a sand blast method and a projecting part 11a formed in the etching work cross section of the crystal substrate 11 is sand blast-worked and cut. Thus, the etching work cross section in the crystal substrate 11 is formed into a desired shape. Then, the mask 12 installed in the crystal substrate 11 is removed and therefore the crystal substrate 11 of the desired shape without burrs in the work cross section can be obtained.</p>
申请公布号 JP2000323950(A) 申请公布日期 2000.11.24
申请号 JP19990129705 申请日期 1999.05.11
申请人 MEIDENSHA CORP 发明人 ABE HIDETAKA;MATSUMOTO HISASHI
分类号 B24C1/04;H01L41/22;H01L41/332;H01L41/337;H03H3/02;H03H9/19 主分类号 B24C1/04
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