CAPACITOR FOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To obtain a small-sized capacitor which can solve the problem of leakage current or other problems. SOLUTION: The capacitor comprises a conductive plug 7 comprising a top portion comprising sidewalls, and a bottom portion. The bottom portion of the conductive plug 7 is coated with materials 3 and 5 selected form a group consisting of titanium and titanium nitride, and the top portion of the conductive plug 7 is not coated with a material selected form a group consisting of titanium and titanium nitride.