| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve a positioning accuracy in the case of positioning a sample at a predetermined position of a sample base without cost. SOLUTION: The apparatus 1000 for positioning comprises a sample profile detecting means 20 for detecting a profile of a sample 3 placed on a sample base 3, a positional deviation amount calculating means 22 for calculating a positional deviation amount of the sample 3 to a predetermined position of the base 4 based on a detected result of the means 20, a lifting mechanism 2 for lifting the sample 3 from the base 4 in response to the deviation amount, and a drive means 5 for driving the base 4. The means 5 drives the sample 4 based on the deviation amount while the sample 3 is lifted from the base 4 by the mechanism 2.</p> |
