| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a reticle take-out and housing device which is simple in structure, is good in workability and can correspond to a take-out and a housing of reticles with the same device as the device, even through the sizes of the reticles and the thicknesses of the reticles are different from each other, and a reticle take-out and housing method. SOLUTION: A reticle take-out and housing device is constituted into a structure, wherein the device has one pair of carrying hands 3, pawls 4 which are provided on the upper side surfaces of the respective carrying hands and oppose to each other, one pair of carrying hand receiving axes 9 with each one end which is mounted to each carrying hand of the receiving axes 9, and a carrying hand receiving axis holding member which holds each carrying hand receiving axis and is provided movably in the directions intersecting orthogonally to the axial directions of the carrying hand receiving axes.</p> |
