ELECTRON EMISSION ELEMENT AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an electron emission element for improving direction controllability of emitted electrons. SOLUTION: After a Pt film is formed on a substrate 1, a resist film is applied on its upper surface for patterning, then the Pt film is provided with etching processing for forming element electrodes 2, 3. Then a conductive film 11 is formed on the element electrodes, and after that, a high voltage wiring part 5 is formed. After forming an insulating layer, a layer 7 including a high resistance material is formed on the upper surface of the high voltage wiring part 5. Then a low voltage wiring part 4 and a control electrode 9 are formed out of the same material. Since the layer 7 containing the high resistance material is formed on the upper surface of the high voltage wiring part 5, direction control performance of emitted electrons is more improved than in case the insulating layer is formed instead of the layer 7 containing the high resistance material. And the control electrode 9 is formed out of the same material as that of the low voltage wiring part 4, so emitted electrons are restrained from spreading.