| 摘要 |
PROBLEM TO BE SOLVED: To prevent adhesion of a solid of a gasification material onto a target. SOLUTION: This focused ion beam device has a means for imperfectly blocking up a gas flow within a gas inlet pipe 7. For example, the gas inlet pipe 7 is once branched into three pipes in a portion of the midstream of the gas inlet pipe 7 and is newly joined into one pipe, while the three-branch portion is provided with a branch plate 12 for branching the gas flow into the two- branch portion on both the sides and newly allowing them to merge into the one pipe. Thereby, even if a solid of a gasification material is present within a gasification material storage part 6 and/or the gas inlet pipe 7 without sublimating (gasifying), the solid of the gasification material collides with the branch plate 12 to adhere to the branch plate 12.
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