| 摘要 |
PROBLEM TO BE SOLVED: To perform the X-ray analysis of a sample without receiving adverse effect by X-ray of low energy having large intensity. SOLUTION: Incident X-rays 5 being white X-ray from an X-ray source and guided to a filter for X-ray analysis, part of white X-ray is totally reflected 7, and residual X-ray 9 transmit through the filter while they are refracted to irradiate a sample 15. An X-rays 16 reflected by the sample 15 are guided to an X-ray detection means 17 and the intensity corresponding to the energy of the reflected X-rays 16 is detected. The filter 1 for X-ray analysis is constituted by forming thin films 3, 4 of Au or Pt on both surfaces of a support plate 2 comprising Be.
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