| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion implanter allowing an inspection of an insulating state in a filament before mounting of an ion source head to the ion implanter. SOLUTION: This ion implanter has the same structure as a conventional implanter except a structure of a negative side terminal 40 of a filament. The negative side terminal 40 provided in this implanter is provided with insulative sleeves 42 and a conductor 48 in addition to a conventional structure. The insulative sleeve 42 is provided around a screw 38 and insulates the screw 38 from a mounting part 34, while the conductor 48 electrically connects with the mounting part 34, and is attached to a back plate of an ion source head through an insulating plate 44 with a screw 46 to connect the negative side terminal 40 of the filament to the back plate through the screw 46 and the mounting part 34. The negative side terminal 40 is electrically connected to the ion source head by fastening the conductor 48 to the back plate through the insulating plate 44 with the screw 46, while the filament is insulated from the ion source head by detaching the screw 46.
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