| 摘要 |
PROBLEM TO BE SOLVED: To maximize sample moving distance in a range capable of performing image process and to improve throughput by optimizing a corrective interval so as to decrease the corrective interval, by detecting positional displacement of a sample and optimizing the corrective interval of sample position correction performed during a sample movement based on a correcting history so that the sample is always positioned at the center of an image display device. SOLUTION: A sample stage comprises a tilting direction driving mechanism 7, a rotation direction driving mechanism 6, and a horizontal direction driving mechanism 5. An image processing device 4 detects, using a secondary electron detector 3, secondary electrons generated when an electron beam emitted from an electron source 2 is radiated to a sample 1, and images them as sample surface information. Using an image representing this sample surface information, an image position-detecting device 10 detects a sample position. Displacement of an observed image is calculated based on the detected position information to control the stage by a control system 9 so that the observed object is always placed at the center of an image display device 8.
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