| 摘要 |
PROBLEM TO BE SOLVED: To surely remove a foreign body from the surface of an electronic component of a cathode holder or the like in short time. SOLUTION: This cleaning method is for removing a foreign body from the surface of an electronic component by spraying pressurized steam or preferably a fluid of a mixture of hot water and pressurized steam. The fluid of a mixture of hot water and pressurized steam is supplied to nozzles 31A,... through passages and injected against an electronic component.
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