发明名称 |
Automatic management of data associated with semiconductor production installations allowing operator intervention for optimum production |
摘要 |
<p>The automatic management generates processing data in real-time corresponding to data on the wafer batch. A controller translates stock handling (600) and processing data in real-time to generate control signals (700) for the processing. The data is stored for each batch and a historic record (400) of the process created.</p> |
申请公布号 |
FR2793916(A1) |
申请公布日期 |
2000.11.24 |
申请号 |
FR20000006508 |
申请日期 |
2000.05.22 |
申请人 |
HYUNDAI ELECTRONICS INDUSTRIES CO LTD |
发明人 |
SON MYUNG SEUNG;CHO WON SOO;JANG JIN HO |
分类号 |
G06Q50/00;G05B15/02;G05B19/418;G06Q50/04;H01L21/02;(IPC1-7):G06F17/60;H04L29/02;H01L21/00 |
主分类号 |
G06Q50/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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