COLD CATHODE FIELD ELECTRON EMISSION ELEMENT AND ITS MANUFACTURE AS WELL AS COLD CATHODE FIELD ELECTRON EMISSION TYPE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a cold cathode field electron emission element easily manufactured and capable of coping with a big screen of a display device. SOLUTION: This cold cathode field electron emission element is provided with (A) a cathode electrode 11 formed on a support 10, (B) an insulating layer formed on the support 10 including the cathode electrode 11, (C) a gate electrode 13 formed on the insulating layer 12, (D) an opening 14 penetrating the gate electrode 13 and the insulating layer 12, (E) a resistor layer 15e formed on the cathode electrode 11 located at the bottom of the opening 14 and having the tip part in a shape of a drill, and (F) an electron emitting part 17e made of a conductive material whose work function is smaller than that of the material constituting the resistor layer 15e and formed on the tip of the resistor layer 15e reflecting its drill shape.