| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress dispersion of electron emission characteristic of emitter corns, and at the sametime, to uniforming emission currents emitted by the emitter corns. SOLUTION: In this field emission element by forming cathode holes 11 having a prescribed diameter in islands of cathode electrode 2 right under emitter corns 7, the resistance R1 between the emitter corns 7 and the islands of cathode electrode 2 is determined by the film thickness of a resistance layer 4 and the diameter of the cathode holes 11, thereby the resistance R1 can be made larger than the conventional resistance between an emitter and a cathode. Since the resistance R1 is almost constant, the dispersion of the electron emission characteristic of emitter corns 7 can be suppressed as well.</p> |
