| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing device where a gap between two electrodes is accurately and efficiently regulated and controlled and a method of regulating a gap between the electrodes. SOLUTION: A semiconductor manufacturing device is equipped with an upper electrode 9 and a lower electrode 7, and a gap between the electrodes 9 and 7 is set at a prescribed value to manufacture a semiconductor. The device is equipped with motors 13 to 15 which are mounted on the upper electrode 9 to relatively move it with regard to the lower electrode 7, visible ray sensors 21 to 23 which measure the height of targets A, B, and C that are larger than a prescribed value, and a motor controller 17 which controls the motors 13 to 15 resting on the measured values measured by the sensors 21 to 23.
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