发明名称 SCANNING TUNNELING MICROSCOPE, ITS PROBE, PROCESSING METHOD FOR THE PROBE AND PRODUCTION METHOD FOR FINE STRUCTURE
摘要 <p>A scanning tunneling microscope capable of constructing a continuous fine structure, its probe, a processing method for the probe and a production method for a fine structure. A probe (2) for a scanning tunneling microscope made of inonic conductive and electronic conductive Ag2S single crystal is provided, a voltage and a tunnel current (6) is applied to between the probe (2) and a substrate (3) to move the above Ag ions and grow a protrusion (mini-chip) consisting of Ag ions or Ag atoms at the tip end of the probe (2), after the growth of the protrusion, the applied voltage polarity is reversed to allow Ag ions or Ag atoms constituting the grown protrusion to re-dissolve into the Ag2S single crystal and shrink the protrusion, and a probe (2) having a shaped protrusion consisting of the Ag ions or Ag atoms is formed. Movable ions in a mixed conductive material or atoms constituting a mixed conductive material are applied to a substrate to form a fine structure on the substrate.</p>
申请公布号 WO2000070325(P1) 申请公布日期 2000.11.23
申请号 JP1999006385 申请日期 1999.11.16
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