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发明名称
Externe Hochspannungsansteuerung für ein Lasersystem
摘要
申请公布号
DE69702462(T2)
申请公布日期
2000.11.23
申请号
DE19976002462T
申请日期
1997.01.20
申请人
CYMER, INC.
发明人
DAS, PALASH P.;PAYNE, JAMES D.;MIXON, CURTISS L.;EIS, RICHARD A.
分类号
H01S3/097;H01S3/134;H01S3/225;(IPC1-7):H01S3/097
主分类号
H01S3/097
代理机构
代理人
主权项
地址
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