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发明名称
Scanning exposure apparatus and device manufacturing method
摘要
申请公布号
EP0893738(A3)
申请公布日期
2000.11.22
申请号
EP19980305740
申请日期
1998.07.17
申请人
CANON KABUSHIKI KAISHA
发明人
KATAOKA, YOSHIHARU
分类号
G03F7/20;G03F7/207;G03F9/00;G03F9/02;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
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