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发明名称
WAFER CARRIER AND SEMICONDUCTOR APPARATUS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
EP1053442(A1)
申请公布日期
2000.11.22
申请号
EP19990905586
申请日期
1999.02.01
申请人
SILICON VALLEY GROUP THERMAL SYSTEMS LLC
发明人
YAO, JACK, CHIHCHIEH;BAILEY, ROBERT, JEFFREY
分类号
B65G1/00;B65G49/07;C23C16/00;C23C16/458;C23C16/54;H01L21/205;H01L21/673;H01L21/677;(IPC1-7):F26B21/06;F26B17/24;F26B17/30;F26B13/30;F26B19/00;F26B25/06;B65G25/00;B66C17/08
主分类号
B65G1/00
代理机构
代理人
主权项
地址
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