发明名称 LASER SCANNING SYSTEM MIRROR
摘要 A non-symmetrical scanning mirror for a laser scanning system is stiffer at a bottom end than at a top end. The mirror, which is driven from the bottom end, has a relatively high resonant frequency and can thus accelerate quickly and smoothly. The mirror may be wider or thicker at the bottom end or it may be made stiffer by attaching stiffeners to the bottom end.
申请公布号 WO0029894(B1) 申请公布日期 2000.11.16
申请号 WO1999US27102 申请日期 1999.11.15
申请人 GENERAL SCANNING, INC. 发明人 STUKALIN, FELIX
分类号 G02B5/08;B23K26/06;G02B7/182;G02B26/10;H01L21/027;(IPC1-7):G02B5/09 主分类号 G02B5/08
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