Process for transporting vaporous substances through the wall of a vacuum chamber into the chamber comprises inserting the substance through an inner tube of a double casing tube into the vacuum chamber from the outside

摘要

Process for transporting at least one vaporous substance through the wall (4) of a vacuum chamber into the chamber comprises inserting the substance through an inner tube (1) of a double casing tube into the vacuum chamber from the outside. The inner tube and the outer tube (2) of the double casing tube are subjected to an electrical current from a current source (3). An Independent claim is also included for a device for carrying out the above process. Preferred Features: Two vaporous substances having different partial pressures are inserted, the substance with the lower partial pressure being fed through the inner tube and the substance with the higher partial pressure through the annular gap between the inner and outer tubes. At least one of the substances are subjected to a change in flow direction within the vacuum chamber.