Zusammensetzung für reflexionsvermindernde Resistbeschichtung,申请号DE19966010572-传众专利搜索

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发明名称	Zusammensetzung für reflexionsvermindernde Resistbeschichtung
摘要
申请公布号	DE69610572(D1)	申请公布日期	2000.11.16
申请号	DE19966010572	申请日期	1996.03.20
申请人	MITSUBISHI CHEMICAL CORP., TOKIO/TOKYO	发明人	NISHI, MINEO;TERAMOTO, TADASHI
分类号	G03F7/09;(IPC1-7):G03F7/09	主分类号	G03F7/09
代理机构		代理人
主权项
地址

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