SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A method for manufacturing a semiconductor device is provided to simplify a manufacturing process, by minimizing the number of masks, and by making it easy to perform a photolithography process. CONSTITUTION: An active region(51a) is selectively defined on a semiconductor substrate(51). Bit lines(55a) are formed on a side of the active region along the direction in which the active region is formed. A storage node plug electrically connected to the active region and a storage node electrode(58b) forming one body together with the storage node plug are formed by patterning the conductive material, electrically connected to the active region in an upper side of the active region between the bit lines.