| 摘要 |
PURPOSE: A laser diode module and its fabrication method are provided to reduce the size of module and to simplify the structure. CONSTITUTION: A laser diode module comprises a laser diode(23) emitting laser beam, a first mounter(12) supporting the laser diode, a photo diode(25) monitoring the emitted laser beam, a second mounter(16) supporting the photo diode, and an optical fiber(24) transmitting the optical signal. To reduce the size of a laser diode module, a laser diode, a photo diode, and an optical fiber are formed on the same substrate made of a silicon wafer. The substrate has a first groove to adhere a photo diode and a second groove to fix an optical fiber. The intensity of laser beam light is adjusted by the depth of the first groove. The manufacturing method has the following steps: depositing silicon oxide over the silicon substrate and forming an opening part; forming an obstacle layer around the silicon oxide layer; etching the exposure of the substrate; removing the etching layer; and etching the removed area by removing the silicon oxide.
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