METHOD FOR MANUFACTURING OSCILLATOR CONTROLLING FREQUENCY

摘要

PURPOSE: A method for manufacturing an oscillator controlling a frequency is provided to obtain the necessary vibration number by handling a well size of an RTD(Resonate Tunneling Diode). CONSTITUTION: A method for manufacturing an oscillator controlling a frequency comprises the steps of: forming sequentially epitaxial layers of a well layer with a small band gap and a barrier with a large band gap in order to form a quantum well having a two-dimensional structure; injecting p+ ions into the quantum well to form p+ ion layer and forming an RTD having one-dimensional structure; applying an insulating layer thereon; etching selectively the insulating layer and forming n type metal layer(6) and p type metal layer(7); and forming a backside metal(8) on a bottom face of a semiconductor substrate(1).