发明名称 |
METHOD FOR THE PRODUCTION OF A MONOCRYSTALLINE LAYER ON A SUBSTRATE WITH A NON-ADAPTED LATTICE AND COMPONENT CONTAINING ONE OR SEVERAL SUCH LAYERS |
摘要 |
The invention relates to a method for the production of a monocrystalline layer on a substrate with a non-adapted lattice. To this end, a monocrystalline substrate with a buried amply defective layer and a monocrystalline layer produce thereon are used. The buried amply defective layer can be produced by hydrogen implantation. |
申请公布号 |
EP1051740(A1) |
申请公布日期 |
2000.11.15 |
申请号 |
EP19990907288 |
申请日期 |
1999.01.27 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
MANTL, SIEGFRIED;HOLLAENDER, BERNHARD;LIEDTKE, RALF |
分类号 |
C30B23/02;H01L21/20;H01L21/265 |
主分类号 |
C30B23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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