QUARTZ GLASS JIG HAVING LARGE IRREGULARITIES ON THE SURFACE

摘要

A quartz glass jig having large irregularities on the surface thereof, wherein said irregularities have a center line roughness Ra in the range of from 2 to 30 mum, a maximum height Rmax in the range of from 10 to 150 mum, and a width in the range of from 10 to 500 mum, and by a method which comprises forming an inorganic thin film on the surface of a quartz glass jig free from microcracks and having fine irregularities on the surface thereof and thereafter rinsing it a plurality of times.