DEVICE FOR EXPOSING A SEMICONDUCTOR

摘要

PURPOSE: A semiconductor exposing device is provided to prevent the generation of a bridge even a defect is generated on a mask. CONSTITUTION: A first opening portion(31) for passing a light is provided in the central portion to prevent the impurity according to the bridge of a wafer. A first light shielding layer(32) is provided on the outer side of the first opening portion(31) to prevent the passing of the light. A second opening portion(33) is provided on the outer side of the first light shielding layer(32) to pass the light. A second light shielding layer(34) are provided on the outer side of the second opening portion(33) to prevent the passing of the light. According to the device for exposing a semiconductor, the impurity generated by a defect is prevented by including two light shielding layers.