NOZZLE HEAD STRUCTURE OF SEMICONDUCTOR SPIN-ON-GLASS COATING APPARATUS

摘要

PURPOSE: A nozzle head structure of a semiconductor spin-on-glass(SOG) coating apparatus is provided to prevent a foreign substance from being adhered to a gap between a body and a chemical supplying pipe and to prevent the foreign substance from falling off to the surface of a wafer in a coating process, by making a gap outside the chemical supplying pipe, the gap being larger than 10 millimeter in size. CONSTITUTION: A nozzle head(14) structure of a semiconductor spin-on-glass(SOG) coating apparatus has a chemical injecting pipe(13) established on the inside of a body(11), in which the chemical injecting pipe has gaps(12) at regular intervals. The gap formed on the outside of the chemical injecting pipe is characterized in that the gap is larger than 10 millimeter.