| 摘要 |
PURPOSE: An electron gun is provided to obtain an electron beam having a focus characteristic suitable for a high resolution and to prevent shortening of lifespan of electron gun by reducing cathode load. CONSTITUTION: An electron gun(20) comprises a triode unit(GE), an electronic amplifier(28), and focus electrode and anode electrode(27). The triode unit has a cathode(21), a first electrode(22) and a second electrode(23), and generates and focuses electron beam. The electronic amplifier has a micro channel plate(28) for amplifying electron beam generated from the triode unit. The focus electrode and anode electrode constitute a main lens portion for focusing the electron beam amplified by the electronic amplifier.
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