| 摘要 |
PURPOSE: A capacitor is provided to obtain relatively a large electrostatic capacity in same dimensions compared with the prior art. CONSTITUTION: A capacitor is manufactured alternately depositing a nitride and an oxide to form a multi-layer structure, etching a part of the multi-layer structure, wet etching a side wall of the etching part using an etching ratio of nitride to oxide to form a step portion, forming a lower electrode of the capacitor on the side wall of the etching part, whereby the lower electrode of the capacitor is formed in a bending way in its vertical direction by the step portion to increase a surface area of the lower electrode of the capacitor and to obtain a large electrostatic capacity of the capacitor.
|
