CAPACITOR AND METHOD OF FORMING THE SAME

摘要

PURPOSE: A capacitor is provided to be capable of obtaining higher capacitance under the same area as a conventional capacitor. CONSTITUTION: A capacitor comprises a trench(202a), which is formed in a semiconductor substrate(200) and is filled with an insulation film(202b). A bottom electrode(203) of a capacitor(C) is buried in the insulation film(202b). A first dielectric film(204) is formed on the lower electrode(203), and a middle electrode(205) is formed on the first dielectric film(204). A second dielectric film(206) is formed on the middle electrode(205), and a top electrode(207) is formed on the second dielectric film(206).