SCRIBE LINE OF A SEMICONDUCTOR DEVICE

摘要

PURPOSE: A scribe line is provided to prevent a mechanical stress generated by sawing from transmitting into a main chip to obtain a stable operative property of the main chip. CONSTITUTION: A scribe line comprises an insulating substrate(10), a first interlevel insulating film(12a) formed on the substrate(10) and having a plural of first through holes to allow the substrate to be exposed in part, a first stress stopping pattern(s1) formed the internal of the first through holes and taking a conductive plug shape, a second interlevel insulating film(12b) formed on the resulting product and having a plural of second through holes to allow the first stress stopping pattern to be exposed in part, a second stress stopping pattern(s2) formed the internal of the second through holes and taking a conductive plug shape, a third interlevel insulating film(12c) formed on the resulting product and having a plural of third through holes to allow the second stress stopping pattern(s2) to be exposed in part, a third stress stopping pattern(s3) formed on the third interlevel insulating film(12c) including the second through holes and having a laminated structure of conductive plug/conductive film pattern,