SUPER-FINE DISPLACEMENT SENSOR OF MULTIPLE DEGREE OF FREEDOM BY USING OPTICAL FIBER

摘要

PURPOSE: A super-fine displacement sensor of a multiple degree of freedom is provided to perform a fine measuring process by using optical method, finely measures 3 freedom-degree displacement of a spatial rigid substance by using a non-contact and an optical method. CONSTITUTION: An optical signal generator outputs an optical signal through an optical fiber according to an input control signal. A first measurement part illuminates the optical signal on a surface of a measured object, and measures a light quantity of a reflective light. Second measurement parts are symmetrically positioned to each other centering around an output terminal of the first measurement part, measures a focus distance change of the reflective light from the object's surface and a light quantity variation of the reflective light, and outputs them to the outside. A signal processor(1104) measures a displacement of the object's surface by using a measured focus distance variation, and measures a main angle and of the object's surface(1109) and a pitch angle of the object's surface by using a measured light quantity variation measured by the first and second measurement parts.