发明名称 DEVICE AND METHOD FOR DISK MANUFACTURING
摘要 PROBLEM TO BE SOLVED: To provide a device and a method for disk manufacturing, capable of preventing the mixing of air bubbles into an adhesive and shortening the time of sticking, and suited to automation. SOLUTION: This device is provided with movable valve bodies 27 and 31 for closing, from the outside, a pair of opposing opening parts formed in a vacuum container 20 so as to be separated from each other. To switch the opening parts between closed and open states by driving the movable valves 27 and 31 by valve driving mechanisms 28 and 32, disk holders 29 and 33 are respectively provided in the inner surface sides of the movable valve bodies 27 and 31 to hold disk substrates. The inside of the vacuum container 20 is evacuated by an evacuation mechanism while the opening are closed by the movable valve bodies 27 and 31, the disk holders 29 and 33 are driven by holder driving mechanisms 30 and 34 in the pressure-reduced vacuum container 20 so as to join together the adhesive surfaces of the disk substrates and, then, the pressure-reduced state of the vacuum container 20 is released by a bent mechanism.
申请公布号 JP2000315338(A) 申请公布日期 2000.11.14
申请号 JP19990125244 申请日期 1999.04.30
申请人 SHIBAURA MECHATRONICS CORP 发明人 MINODA KATSUFUMI
分类号 G11B7/26;(IPC1-7):G11B7/26 主分类号 G11B7/26
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