| 摘要 |
PROBLEM TO BE SOLVED: To improve the yield of a semiconductor test by generating a test pattern for testing the action of a measured circuit, and outputting a measured result produced by the measured circuit when supplied with the test pattern, from an output terminal. SOLUTION: A pattern generating circuit 19 of this semiconductor device 52 generates a test pattern used to test the action of a measured circuit 32, and outputs a test result produced by the measured circuit 32, from a data output terminal 25. A controller 22 outputs a test period signal only by a predetermined cycle to the pattern generating circuit 19, and an oscillator 18 generates frequency clock used for a test and supplies it to the measured circuit 32. An oscillator controller 12 controls the frequency of the oscillator 18, and a clock selector 20 selects a supplied clock signal and supplies it to the measured circuit 32. A test can thereby be previously made in a practical frequency band in a preprocess, so that a rejected semiconductor can be removed prior to being sent to a following process.
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