发明名称 Method of estimating lifetime of floating SOI-MOSFET
摘要 In a method of estimating the lifetime of a floating SOI-MOSFET, constants A and B, stress condition dependency Idt(S) of a drain current and stress condition dependency Isub(S) of a substrate current in a body-fixed SOI-MOSFET, and stress condition dependency Idf(S) of a drain current in the floating SOI-MOSFET are obtained from experiment to estimate lifetime tau f(S) from the following equation: where Wf represents a known channel width of the floating SOI-MOSFET.
申请公布号 US6148273(A) 申请公布日期 2000.11.14
申请号 US19990406826 申请日期 1999.09.28
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MAEDA, SHIGENOBU
分类号 G01R31/26;(IPC1-7):G01R31/26;H01L21/66;H01L21/336;H01L29/78;H01L29/786 主分类号 G01R31/26
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