| 摘要 |
PROBLEM TO BE SOLVED: To extend the life of an apparatus and to obviate repair and packing replacement by installing a water storage tank to keep a gap between it and a cleaning tank and to surround the lower part of the tank and providing a shielding body surrounding the cleaning tank with its one end part fitted to the cleaning tank and the other end part extended into the storage tank. SOLUTION: A cleaning apparatus 1 is composed of a box-shaped cleaning tank 2 which houses a semiconductor wafer Sb and is filled with a cleaning solution L, an outer tank 4 installed to keep a distance (g) from the bottom part of the cleaning tank 2, and a vibrator 6 which is fitted to the bottom part 5 of the tank 4 and vibrates the cleaning solution L usually through water W1. A water storage tank 7 which surrounds the lower part 2b of the tank 2 and the vibrator 6 keeping a gap G and usually stores water W2 is installed. Moreover, A shielding body 8 which surrounds the tank 2 with its one end part 8a fitted to the tank 2 and the other end part 8b extended close to the bottom part 9 of the storage tank 7 is provided. The shielding body 8 is formed in the shape of a skirt having an inclined part 8t and a perpendicular part 8s to prevent the adhesion of the cleaning solution L and chemical liquid components to the vibrator 6.
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